发明名称 |
Optical proximity correction (OPC) using automated shape and edge pre-sorting |
摘要 |
There is provided a method for Optical Proximity Correction (OPC) of a semiconductor device. The method includes the step of pre-sorting the shapes and/or the shape edges into groups based on pre-defined criteria. Different regions of interest are applied to at least some of the shapes and the shape edges, based on which of the groups the at least some of the shapes and the shape edges are pre-sorted into. The pre-defined criteria may include: properties or labels associated with the shapes and/or the shape edges during a design process of the semiconductor device; geometric properties of the shapes and/or the shape edges; structural properties of an overall design of the semiconductor device; and the shapes and/or the shape edges for which a larger region of interest is required.
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申请公布号 |
US2002138810(A1) |
申请公布日期 |
2002.09.26 |
申请号 |
US20010774742 |
申请日期 |
2001.01.31 |
申请人 |
LAVIN MARK A.;SAMUELS DONALD J.;LIEBMANN LARS W.;HAFFNER HENNING |
发明人 |
LAVIN MARK A.;SAMUELS DONALD J.;LIEBMANN LARS W.;HAFFNER HENNING |
分类号 |
G03F1/14;(IPC1-7):G06F17/50 |
主分类号 |
G03F1/14 |
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