| 摘要 |
An object of the present invention is to provide a ferroelectric capacitor which shows excellent ferroelectricity. A silicon oxidation layer 4, a lower electrode 12, a ferroelectric layer 8 and an upper electrode 15 are formed on a silicon substrate 2. The lower electrode 12 is made of palladium oxide. Also, the upper electrode 15 is made by palladium oxide, since palladium oxide prevents leakage of oxygen contained in the ferroelectric layer 8. Thus, the ferroelectric capacitor of the present invention offers excellent ferroelectricity can be realized.
|
