| 摘要 |
The present invention relates to a method of manufacturing integrated circuits including high and low voltage MOS transistors. This method includes steps of forming insulated gate structure forming lightly-doped drain/source regions, depositing an insulating layer; forming a mask above the gates of the high voltage transistors which extends laterally beyond said gates; etching the insulating layer to leave spacers on the edges of the low voltage transistor gates; implanting a dopant adapted to forming heavily-doped drain/source contact regions of the high and low voltage transistors; and forming in a self-aligned way a metal silicide layer on the drain/source contact regions of all transistors, as well as on the gate contacts of the low voltage transistors.
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