| 摘要 |
A surface shape evaluation method for a spherical body comprising the steps of: providing a support hole having a smaller diameter than the spherical body and having a curved bearing surface formed on its opening to have a curvature substantially equal to the curvature of the surface of the spherical body, providing a rotation drive arm for transmitting only a rotation component to the spherical body, providing a vibration sensor having a probe with a flat tip end, rotating the spherical body on a predetermined center axis and on the opening, such that one portion in the radial direction of the spherical body comes into contact with the curved bearing surface while the portion opposite to the one portion in the radial direction of the spherical body comes into contact with the tip end of the rotation drive arm, abutting the flat tip end of the probe of the vibration sensor to a surface portion of the spherical body located on a hypothetical flat surface which is orthogonal to the center axis and passes through the central point of the spherical body to detect the surface shape from the surface portion as vibration amounts, from which the results are through a sampling process and an adding and averaging process in harmonization with rotation velocity of the spherical body, and a frequency analysis process are evaluated as a numerical value e.g. of at least displacement.
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