EQUIPMENT FOR DECOMPOSING DELETERIOUS GAS

摘要

PROBLEM TO BE SOLVED: To provide equipment for decomposing a deleterious gas capable of obtaining high abilities of decomposition by enhancing an irradiation rate of plasma. SOLUTION: In the equipment for decomposing a deleterious gas which flows in a reaction vessel by plasma, the equipment includes a gas circulating means 20 to return a part of the gas which has passed through the reaction vessel 10 into the reaction vessel 10, and the circulation flow of the returned gas within the reaction vessel 10 is formed by returning the gas.