| 摘要 |
PROBLEM TO BE SOLVED: To apply a chemical liquid having high cleanness. SOLUTION: A filter 4 is integrally formed from a liquid storage chamber 8 housing the chemical liquid supplied from a liquid tank 3 and a filter medium housing chamber 9 for filtering the chemical liquid of the liquid storage chamber 8 by a filter 11 to supply the same to a pump 16, and also integrally provided along with the pump 16. Further, provided are a liquid introducing flow channel 2 allowing the liquid storage chamber 8 and the liquid tank 3 to communicate with each other, an exhaust flow channel 13 for discharging air in the liquid storage chamber 8 and a flow channel 15 on the inlet side of the pump allowing the filter medium housing chamber 9 to communicate with the pump 16. |
