System and method for calibrating semiconductor processing equipment

摘要

A system for measuring the rotational speed of a shaft driven by a motor. The system includes a rotation measurement device having a rotatable sensor and configured to generate a signal corresponding to rotation of the sensor. The rotation measurement device may be supported by a fixture mountable on the motor. A coupler is associated with the sensor and includes a gripping surface configured to contact and grip the end-surface of the shaft to couple the sensor to the shaft and impart the rotation of the shaft to the sensor.