发明名称 High density cavity-up wire bond BGA
摘要 A method is provided for mounting high-density wire bond semiconductor devices. A layer of dielectric is deposited over the first surface of a metal panel. One or more thin film interconnect layers are then created on top of the dielectric layer. The BUM technology allows for the creation of a succession of layers over the thin film layers. The combined layers of thin film and BUM form the interconnect substrate. One or more cavities are created in the second surface of the metal panel; openings through the layer of dielectric are created where the layer of dielectric is exposed. One or more wire bond semiconductor die are inserted into the cavities, are die bonded and wire bonded to the openings that have been created in the layer of dielectric. Openings are created in the bottom BUM layer; solder balls are inserted and attached to this BUM layer for the completion of the Ball Grid Array (BGA) package.
申请公布号 US6455926(B2) 申请公布日期 2002.09.24
申请号 US20010900558 申请日期 2001.07.09
申请人 THIN FILM MODULE, INC. 发明人 HO CHUNG WEN
分类号 H01L21/48;H01L23/31;H01L23/498;(IPC1-7):H01L23/02 主分类号 H01L21/48
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