| 摘要 |
PROBLEM TO BE SOLVED: To ensure a high cleaning quality without generating a latent flaw and also generating a cleaning failure to remove the scum residue of an abrasive or a stain, even when an optical element is less water-resistant and detergent- resistant. SOLUTION: This method for cleaning an optical element comprises an abrasive removing step to sprinkle and run a fluid to which an ultrasonic wave is applied over the optical element to be cleaned, a step to soak the optical element in a semi-water based solvent, a step to soak the optical element in a cleaning solution and perform its finish cleaning process, a step to rinse the optical element with pure water, a step to drain the moisture by means of a hydrophilic alcohol solution, a step to perform a finish cleaning process by the help of a hydrocarbon solvent and a drying step using a hot blast.
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