发明名称 Internally ballasted silicon germanium transistor
摘要 A bipolar transistor is disclosed. The bipolar transistor comprises: a silicon substrate; a collector formed in the semiconductor substrate, a base formed over the collector, the base having an intrinsic base region and an extrinsic base region, the extrinsic base region forming an internal resistor, an emitter formed over the intrinsic base region; and a dielectric layer formed between the extrinsic base region and the collector, the extrinsic base region. the dielectric layer and the collector forming an internal capacitor. The base of the transistor may be silicon-germanium.
申请公布号 US6455919(B1) 申请公布日期 2002.09.24
申请号 US20010811979 申请日期 2001.03.19
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BRENNAN CIARAN J.;VOLDMAN STEVEN H.
分类号 H01L21/20;H01L21/331;H01L21/822;H01L21/8222;H01L27/04;H01L27/06;H01L29/73;H01L29/732;H01L29/737;H01L31/117;(IPC1-7):H01L31/117 主分类号 H01L21/20
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