发明名称 |
Method of fabricating thin-film photovoltaic module |
摘要 |
This invention provides a method of fabricating a thin-film photovoltaic module having a structure in which a plurality of thin films are stacked. This method includes postulating a substrate temperature during laser scribing for each thin film, determining a scanning pattern by taking account of the size of the substrate at the postulated temperature, and dividing each thin film in accordance with the scanning pattern while keeping the substrate temperature at the postulated temperature or a temperature in its neighborhood.
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申请公布号 |
US6455347(B1) |
申请公布日期 |
2002.09.24 |
申请号 |
US20000525494 |
申请日期 |
2000.03.15 |
申请人 |
KANEKA CORPORATION |
发明人 |
HIRAISHI MASAFUMI;HAYASHI KATSUHIKO;YAMAGISHI HIDEO |
分类号 |
H01L27/142;H01L31/042;H01L31/18;H01L31/20;(IPC1-7):H01L31/18 |
主分类号 |
H01L27/142 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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