发明名称 Method and device for placing electrode for signal observation
摘要 In a method for placing an electrode for signal observation, after tracking equipotential wires, conducting the collation to give the correspondence in connection relation and adding the wire name to the collated wire, it is checked out whether the top-layer wire exists about all equipotential wires, if the equipotential wire connected to the top-layer wire exists, the concerned wire name and top-layer wire information are extracted and output. If the equipotential wire connected to the top-layer wire does not exist, it is judged whether the lead-out to the top layer of equipotential wire is possible or not in cases of moving the wire and not moving the wire, then, according to the result, a given processing is conducted. Thus, the placement position of electrode on chip to equipotential wire desired to conduct the signal observation is searched automatically.
申请公布号 US6457158(B1) 申请公布日期 2002.09.24
申请号 US20000591983 申请日期 2000.06.12
申请人 NEC CORPORATION 发明人 INOUE ITARU
分类号 H01L21/3205;G01R1/06;G06F17/50;H01L21/82;H01L23/52;(IPC1-7):G06F17/50 主分类号 H01L21/3205
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