| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for feeding a coating liquid by which the coating liquid is precisely filtered and exchanging a filter medium caused by clogging is few and continuous coating for a long time is possible in a method in which, while foreign substances in the coating liquid are filtered, the liquid is delivered to prevent defects on a coating film from being generated, and a coating apparatus. SOLUTION: The method for feeding the coating liquid in which after the coating liquid is passed through a filter A, it is received once in a buffer tank, and thereafter, it is passed through a filter B and is sent to a coater is provided, and the method for feeding the coating liquid is characterized in that the filter A has higher degree of filtering accuracy than the filter B.
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