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发明名称
VERFAHREN ZUM HERSTELLEN INTEGRIERTER SCHALTUNGEN
摘要
申请公布号
DE1931511(B2)
申请公布日期
1971.08.19
申请号
DE19691931511
申请日期
1969.06.20
申请人
发明人
分类号
H01L21/00;H01L21/205;H01L21/3205;(IPC1-7):01L7/34
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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