发明名称 Semiconductor device, method of manufacturing the same and method of arranging dummy region
摘要 Provided are a semiconductor device capable of satisfactorily solving a floating-body problem and a hot carrier problem which often arise in an SOI device and of causing a widely distributed partial isolating film to generate a crystal defect for peripheral structures with difficulty and a method of manufacturing the semiconductor device. A dummy region DM1 having no function as an element is formed at almost regular intervals in a partial isolating film 5b provided between MOS transistors TR1. Consequently, the occupation rate of the dummy region DM1 having a lower resistance value than that of a silicon layer 3b provided under the partial isolating film 5b is increased so that the floating-body problem and the hot carrier problem can be solved.
申请公布号 US6455894(B1) 申请公布日期 2002.09.24
申请号 US20000677881 申请日期 2000.10.03
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 MATSUMOTO TAKUJI;IWAMATSU TOSHIAKI;HIRANO YUUICHI
分类号 H01L21/762;H01L21/76;H01L21/84;H01L27/08;H01L27/12;H01L29/786;(IPC1-7):H01L27/01 主分类号 H01L21/762
代理机构 代理人
主权项
地址