发明名称 |
Semiconductor device, method of manufacturing the same and method of arranging dummy region |
摘要 |
Provided are a semiconductor device capable of satisfactorily solving a floating-body problem and a hot carrier problem which often arise in an SOI device and of causing a widely distributed partial isolating film to generate a crystal defect for peripheral structures with difficulty and a method of manufacturing the semiconductor device. A dummy region DM1 having no function as an element is formed at almost regular intervals in a partial isolating film 5b provided between MOS transistors TR1. Consequently, the occupation rate of the dummy region DM1 having a lower resistance value than that of a silicon layer 3b provided under the partial isolating film 5b is increased so that the floating-body problem and the hot carrier problem can be solved.
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申请公布号 |
US6455894(B1) |
申请公布日期 |
2002.09.24 |
申请号 |
US20000677881 |
申请日期 |
2000.10.03 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
MATSUMOTO TAKUJI;IWAMATSU TOSHIAKI;HIRANO YUUICHI |
分类号 |
H01L21/762;H01L21/76;H01L21/84;H01L27/08;H01L27/12;H01L29/786;(IPC1-7):H01L27/01 |
主分类号 |
H01L21/762 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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