发明名称 HEATING DEVICE AND THERMAL TREATMENT APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a heating device which enables the rapid temperature rise of an object to be treated and also is excellent in an economical efficiency, and to provide a thermal treatment apparatus. SOLUTION: The heating device comprises lamps and a lamp house. The lamps have a first lamp and a second lamp having an irradiation area narrower than that of the first lamp, respectively, The lamp house has a first lamp housing part for housing the first lamps in the center of the lamp house, and a second lamp housing part for housing the second lamps around the first lamp housing part.
申请公布号 JP2002270532(A) 申请公布日期 2002.09.20
申请号 JP20010072317 申请日期 2001.03.14
申请人 TOKYO ELECTRON LTD 发明人 SHIMIZU MASAHIRO;YAZAWA MINORU
分类号 H05B3/00;H01L21/205;H01L21/26;(IPC1-7):H01L21/26 主分类号 H05B3/00
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