| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electrostatic actuator, which is capable of protecting its vibration plate being deformed by gas which is generated from a sealing compound or hardening and contraction of the sealing compound, and which will not allow time to change its characteristics due to working environment, such as pressure and temperature. SOLUTION: This electrostatic actuator includes a vibration plate, a counter electrode, a vibration chamber, a primary tube which communicates the vibration chamber with the outside. The portion, where the primary tube communicates the chamber with outside, is sealed using a plurality of laminated layers of organic materials. The counter electrode is electrically-connected to a flexible substrate, and the connected portion is sealed with secondary organic materials. The portion, where the primary tube communicates with the outside, may be sealed with inorganic materials or laminated layers having the inorganic material on an outmost bottom.</p> |
