APPARATUS FOR TREATING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To improve handling performance by improving the method for securing a protective tube inserted with a temperature measuring means. SOLUTION: The apparatus for treating a substrate comprises means 13 for holding the substrate 12, a treating container 5 being loaded with the holding means, a heater unit 2 surrounding the treating container, and means 10 for measuring the temperature in the treating container. The substrate treating system treats the substrate by introducing a treating gas into the treating container and heating the substrate up to a given temperature wherein the temperature measuring means is loaded into the protective tube 9 bonded to the treating container.