SUBSTRATE TREATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To reduce manufacturing cost of a heater unit. SOLUTION: A heater unit 20 is provided with an insulating wall 23 installed in a concentric circle by forming a gap 22 inside a case 21 and a heater 34 lay on the inner periphery of the wall 23, the wall 23 is constituted of a disc- shaped ceiling wall part 24 and a cylindrical sidewall 25 and the sidewall 25 is constituted in a structure that a plurality of insulating blocks 26 are stacked. Each insulating block 26 is provided with a main body 27 molded into a doughnut form by a molding die using an insulating material and a spigot joint male part 28 on the upper end part of the main body 27 and a spigot joint female part 29 on the lower end part of the main body 27 are spigot-jointed with each other and are assembled on the sidewall 25. Heating elements 32 constituting the heater 34 are mounted in mounting grooves 30 provided in the inner peripheral surfaces of the blocks 26 respectively. Hereby, as a plurality of the same blocks 26 have only to be integrally molded by the molding die in spite of the length specification of the wall 23, the manufacturing cost of the wall 23 can be reduced.