| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for evenly fabricating field electron emission elements capable of controlling ON/OFF by low voltage. SOLUTION: The field electron emission element is fabricated by fabricating a catalytic metal layer for carbon nanotubes, an insulating layer, and a laminated film of metal layers in this order on a substrate, providing an opening exposing the catalytic metal layer for carbon nanotubes by photolithography and dry etching, and developing carbon nanotubes. A hole opening an emitter is fabricated in an insulator barrier layer by fabricating a columnar resist structure to be used as a sacrifice layer on the catalytic metal layer for carbon nanotubes fabricated on the substrate, depositing an insulator and then carrying out surface polishing.</p> |
