发明名称 STRUCTURE OF FLASH MEMORY CELL, MANUFACTURING METHOD AND OPERATING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a channel write/erase flash memory structure of a flash memory cell, to provide its manufacturing method, and an operating method. SOLUTION: The flash memory cell comprises a first well region of a first conductivity type, a second well region of a second conductivity type located on the first well region, a third well region of the first conductivity type located on the second well region, a first oxide layer on the third well region, a stack structured gate on the first oxide layer, a doped region of the first conductivity type as a drain located on the side face of the stack structured gate under the first oxide layer, a shallow doped region of the second conductivity type located on the side face of the doped region of the first conductivity type under the stack structured gate, and a heavily doped region of the second conductivity type located under the doped region of the first conductivity type and connected to the shallow doped region of the second conductivity type.
申请公布号 JP2002270706(A) 申请公布日期 2002.09.20
申请号 JP20020019624 申请日期 2002.01.29
申请人 EMEMORY TECHNOLOGY INC 发明人 HSU CHING-HSIANG;YANG CHING-SUNG
分类号 H01L21/8247;G11C14/00;G11C16/04;H01L21/336;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/824 主分类号 H01L21/8247
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