发明名称 ELECTRONIC CIRCUIT DESIGN SIMULATOR
摘要 PROBLEM TO BE SOLVED: To accurately simulate dynamic characteristics of three-dimensional ramp electronic device circuit including the area of transistor, wiring section, capacitor, and resistor. SOLUTION: An electronic device simulator comprises: a three-dimensional ramp device model; a three-dimensional viscoelasticity process simulation model; and a mutually connected material design model. The three-dimensional ramp device element model comprises: a Poisson equation model; an electron continuity equation model; a hole continuity equation; a Maxwell equation model; an eddy-current equation model; and an Ohm's law equation model. The simulator clarifies the three-dimensional characteristics of circuits and determines the circuit characteristics.
申请公布号 JP2002270478(A) 申请公布日期 2002.09.20
申请号 JP20010390195 申请日期 2001.12.21
申请人 TOSHIBA CORP 发明人 OKADA TAKAKO
分类号 H01L21/28;G06F17/50;H01L21/00;H01L21/3205;H01L21/82;H01L23/52;(IPC1-7):H01L21/00;H01L21/320 主分类号 H01L21/28
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