摘要 |
PROBLEM TO BE SOLVED: To accurately simulate dynamic characteristics of three-dimensional ramp electronic device circuit including the area of transistor, wiring section, capacitor, and resistor. SOLUTION: An electronic device simulator comprises: a three-dimensional ramp device model; a three-dimensional viscoelasticity process simulation model; and a mutually connected material design model. The three-dimensional ramp device element model comprises: a Poisson equation model; an electron continuity equation model; a hole continuity equation; a Maxwell equation model; an eddy-current equation model; and an Ohm's law equation model. The simulator clarifies the three-dimensional characteristics of circuits and determines the circuit characteristics. |