发明名称 SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a semiconductor device having excellent reflecting characteristics by optimizing an antireflection film. SOLUTION: The semiconductor device comprises the antireflection film. The antireflection film has a first silicon nitride film 3a formed on an n-type diffused layer 2, and a second silicon nitride film 3b having a smaller refractive index than that of the first film 3a and formed on the film 3a.</p>
申请公布号 JP2002270879(A) 申请公布日期 2002.09.20
申请号 JP20010072312 申请日期 2001.03.14
申请人 MITSUBISHI ELECTRIC CORP 发明人 HAYASHI MASUMI;NAMISAKI HIROBUMI
分类号 C23C16/42;H01L21/318;H01L31/04;H01L31/10;(IPC1-7):H01L31/04 主分类号 C23C16/42
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