MANUFACTURING METHOD OF THIN-FILM TRANSISTOR, ACTIVATION OF IMPURITY AND THIN-FILM TRANSISTOR

摘要

PROBLEM TO BE SOLVED: To protect an organic polymer substrate from damages even if a semiconductor laser is irradiated with a laser beam, in order to activate impurity-doped into a semiconductor layer. SOLUTION: An impurity is doped into the semiconductor layer 3 formed on the organic polymer substrate 1, and the impurity of the semiconductor layer 3 is activated by irradiating the semiconductor layer 2 with an energy beam, such as from Ar ion laser or copper vapor laser, of which energy absorption at the organic polymer substrate 1 is low such as not to give damages to such an organic polymer substrate 1.