| 摘要 |
<p>PROBLEM TO BE SOLVED: To solve the problem of the method for fabricating a piezoelectric device element by etching, through the use of a solution that the contour and the side face thereof are susceptible to variation due to crystal anisotropy and thereby the characteristics are unstable and the design is made difficult. SOLUTION: Since the piezoelectric device element has a substantially trapezoidal cross-section, the side face of contour is insusceptible to crystal anisotropy and variation thereof is suppressed among individual piezoelectric device elements thus stabilizing the characteristics. By making individual piezoelectric device elements to be of a substantially trapezoidal cross-section, they can be separated easily after anisotropic etching.</p> |
