摘要 |
PROBLEM TO BE SOLVED: To increase manufacturing tact while preventing air bubbles from being mixed in at the time of sticking when manufacturing an optical disk by sticking a disk substrate and a sheet together. SOLUTION: A base plate 11 and a bell jar 12 are separated, the sheet 4 is mounted on a sheet mounting surface 13a with an adhesive layer upwards and then a disk substrate 1 is fitted to a substrate positioning pin 15. Parallelly, the inside of a sub chamber 18 is exhausted and turned to a recessed shape. After uniting the base plate 11 and the bell jar 12, a main chamber 17 is evacuated. In the stage that an elastic body film 16 becomes planar, the evacuation of the main chamber 17 is ended and the sub chamber 18 is opened to the atmosphere. The elastic body film 16 is expanded inside the main chamber 17 and the disk substrate 1 is pressurized and press-fixed to the sheet 4. After the press fixation is stabilized, the base plate 11 and the bell jar 12 are separated and the optical disk is carried away. |