| 摘要 |
PROBLEM TO BE SOLVED: To prevent degradation of characteristics due to absorption of moisture by a highly hygroscopic porous low-permittivity insulating material. SOLUTION: A sample 2 containing a low-permittivity insulating material is placed in a decompression chamber 1, and irradiated with a microwave by using a magnetron 7 under exhaustion and decompression to dry the material 2. This drying process is performed immediately before the drying process in CVD, sputtering, etc.
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