发明名称 MANUFACTURING METHOD OF SEMICONDUCTOR CHIP
摘要 PROBLEM TO BE SOLVED: To provide the manufacturing method of a semiconductor chip for preventing the damage of the semiconductor chip in dicing, and for improving working efficiency when the semiconductor chip is manufactured. SOLUTION: A wafer is subjected to dicing for changing the semiconductor chip into individual pieces, and the backside of the semiconductor chip is polished.
申请公布号 JP2002270544(A) 申请公布日期 2002.09.20
申请号 JP20010061894 申请日期 2001.03.06
申请人 MITSUI HIGH TEC INC 发明人 UMEDA KAZUHIKO
分类号 B24B7/06;H01L21/301;(IPC1-7):H01L21/301 主分类号 B24B7/06
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