| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method for manufacturing an integrated thin-film solar battery having high characteristics with improved productivity. SOLUTION: The manufacturing method comprises a first process for forming a first electrode film 12 on one main surface 11a of an insulating substrate 11 and then applying continuously oscillated laser beams L1 for dividing the first electrode film 12 into rectangular slices, a second process for dipping one main surface 11a in liquid 13 containing water, a third process for forming a semiconductor film 14 containing a pn junction on the first electrode film 12, a fourth process for dividing the semiconductor film 14 into rectangular slices by removing one portion of the semiconductor film 14 in a stripe shape, a fifth process for forming a second electrode film 15 on the semiconductor film 14 and the first electrode film 12 that is exposed after the semiconductor film 14 is removed, and a sixth process for dividing the second electrode film 15 into rectangular slices by removing also the semiconductor film 15 and one portion of the second electrode film 15 in a stripe shape.</p> |
