| 摘要 |
The semiconductor test apparatus of the present invention comprises an input data generating part for generating the input measurement data that is applied to the test device based on input measurement conditions, an expected data generating unit for generating the measurement expectation data based on the measurement conditions, a determination unit that compares the measurement result data, which the test device outputs, and the measurement expectation data based on the input measurement data, determines whether the function of the test device is a pass or failure, and outputs the measurement result data as determination data, and a data log system unit that writes in a time sequence into the log memory the associated data which includes the determination result data, the measurement result data, the measurement expectation data, and the measurement input data for a predetermined interval even after the preset writing termination conditions that terminate the writing have been satisfied.
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