PROCESS AND APPARATUS FOR BLENDING AND DISTRIBUTING A SLURRY SOLUTION
摘要
On-site blending and distribution of oxide abrasives with other constituents as used in semiconductor applications. Constituent blending is accomplished through weighing components individually into a blending tank. Some components may be added by injection or weight. Alternatively blends can be made to varying concentrations by passing the blended oxide solution in a closed circulation loop through a calibrated encapsulated torroid coil to measure electrical conductivity. The resulting conductivity output may be used to add one or more component.
申请公布号
WO02053273(A3)
申请公布日期
2002.09.19
申请号
WO2001IB02608
申请日期
2001.12.17
申请人
L'AIR LIQUIDE - SOCIETE ANONYME A DIRECTOIRE ET CONSEIL DE SURVEILLANCE POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUSE
发明人
SNYDER, DAVID, L.;URQUHART, KARL, J.;SWINDELL, RICHARD, DEAN