| 摘要 |
<p>A piezoelectric/electrostrictive film type actuator (11) driven by the displacement of piezoelectric/electrostrictive elements (78), comprising a ceramics substrate (44) and the piezoelectric/electrostrictive elements (78) installed on the ceramics substrate (44) and formed of piezoelectric/electrostrictive films (79) and electrode films (73, 75, 77), wherein the piezoelectric/electrostrictive elements (78) are formed by stacking the piezoelectric/electrostrictive films (79) of a plurality of layer and the electrode films (73, 75, 77) alternately on each other so that the uppermost and lowermost layers thereof form electrode films, whereby the actuator can be highly integrated easily without such a structure that is stacked with an adhesive agent, a large displacement can be provided at the same drive voltage, the speed of response can be increased, a large force can be generated, and excellent characteristics can be provided.</p> |
