发明名称 Semiconductor device and method of fabricating the same
摘要 A semiconductor device has a semiconductor substrate, a first transistor having a first gate electrode formed of a polycrystalline silicon germanium film as formed above said semiconductor substrate, and a second transistor having a second gate electrode which is formed of a polycrystalline silicon germanium film as formed above the semiconductor substrate and which is different in concentration of germanium from the first gate electrode.
申请公布号 US2002130393(A1) 申请公布日期 2002.09.19
申请号 US20020082257 申请日期 2002.02.26
申请人 TAKAYANAGI MARIKO;FUKUI HIRONOBU 发明人 TAKAYANAGI MARIKO;FUKUI HIRONOBU
分类号 H01L21/28;H01L21/336;H01L21/8238;H01L27/092;H01L29/423;H01L29/43;H01L29/49;H01L29/78;(IPC1-7):H01L29/76 主分类号 H01L21/28
代理机构 代理人
主权项
地址