| 摘要 |
A substrate for use of an ink jet head comprises a plurality of heat generating resistive elements formed on a substrate through insulation layer, electrode wiring electrically connected with said heat generating resistive elements, and protection layer to cover said heat generating resistive elements. Then, the protection layer of this substrate is made dielectric formed by plural atoms containing Si, and at the same time, the composition ratio of the dielectric of the portion of the protection layer at least nearest to the heat generating resistive elements is almost the stoichiometric composition ratio, and then, the composition ratio of the dielectric of the portion farthest from the heat generating resistive elements is richer in Si than the stoichiometric composition ratio. With the provision of this substrate, the heat conductivity becomes greater to make it possible to transfer heat generated by the heat generating resistive elements to ink side efficiently, while keeping the reliability of the film and the life thereof. Hence, it is made possible for an ink jet head provided with such substrate to reduce the power dissipation needed for bubbling without affecting the efficiency and the life of the head.
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