Verbesserungen bei der Herstellung von Kristallsubstraten
摘要
This disclosure relates to the fabrication of components on a single crystal substrate. A method is disclosed of overcoming the problems encountered in defining etched features on a silicon substrate. In particular, there is disclosed a method of producing a multichip module comprising a silicon substrate having surface features for the placement of components. An organic dielectric is applied to the substrate prior to the use of an etchant whereby interconnects can be defined. <IMAGE>
申请公布号
DE69618264(T2)
申请公布日期
2002.09.19
申请号
DE1996618264T
申请日期
1996.02.29
申请人
NORTEL NETWORKS LTD., ST.LAURENT
发明人
AYLIFFE, PETER JOHN;HARRISON, PAUL MARK;GEEAR, MARTINE CHRISTOPHER;PARKER, JAMES WILSON;PEALL, ROBERT GEORGE;HARCOURT, ROGER WILLIAM