POSITIVE TYPE PHOTOSENSITIVE COMPOSITION

摘要

PURPOSE: To provide a positive type photosensitive composition having high resolving power when a bracelet illumination lamp is used, having a broad defocus latitude, less liable to produce a side lobe in pattern formation using a halftone phase shift mask and less liable to generate particles in storage with age. CONSTITUTION: The positive type photosensitive composition contains a compound which generates a 2-4C fluorine substituted alkanesulfonic acid when irradiated with active light or radiation, a resin having a specified alicyclic hydrocarbon structure and having solubility in an alkali developing solution increased when decomposed by the action of the acid, a basic compound and a fluorine- and/or silicon-containing surfactant.