Method for fabricating III-V compound semiconductor

摘要

A method for fabricating a III-V Group compound semiconductor comprising a step of epitaxially growing on an AlxGa1-xAs layer of lower Al content an AlxGa1-xAs layer of higher Al content, in which step a growth rate of the AlxGa1-xAs layer of higher Al content is made slower than a growth rate of the AlxGa1-xAs layer of lower Al content, thereby effectively inhibiting the occurrence of starting points of abnormal growth at the interface between the two layers.