| 发明名称 |
THERMAL REGULATION OF AN ION IMPLANTATION SYSTEM |
| 摘要 |
A thermoregulation system (42) is used in an ion implantation system (10) for reducing the temperature in an ion source (30) having a vapor pressure that yields a reduced concentration from the ion source material (104).
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| 申请公布号 |
WO02073651(A1) |
申请公布日期 |
2002.09.19 |
| 申请号 |
WO2002US06930 |
申请日期 |
2002.03.06 |
| 申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
VELLA, MICHAEL, C. |
| 分类号 |
H01J27/02;H01J27/04;H01J27/08;H01J37/08;H01J37/317;H01L21/265;(IPC1-7):H01J37/08 |
主分类号 |
H01J27/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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