发明名称 RESIST RELEASING COMPOSITION
摘要 A resist releasing composition comprising a nitro group containing organic compound (A) and a resist releasing agent (B). The resist releasing composition can be used for removing with high efficiency a resist residue formed during wiring in a production process for an electronic circuit or the like for a semiconductor or a liquid crystal, while suppressing the corrosion of a silicon substrate and preventing effectively the corrosion of a-Si and p-Si which are constituent metals of a thin film transistor.
申请公布号 WO02073319(A1) 申请公布日期 2002.09.19
申请号 WO2002JP02262 申请日期 2002.03.11
申请人 NAGASE CHEMTEX CORPORATION;TAKEI, MIZUKI;UCHIDA, EMI;KOTANI, TAKESHI 发明人 TAKEI, MIZUKI;UCHIDA, EMI;KOTANI, TAKESHI
分类号 G03F7/42;(IPC1-7):G03F7/42;H01L21/027 主分类号 G03F7/42
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