Vacuum deposition system

摘要

A vacuum deposition system comprising a vacuum chamber used for keeping a vacuum atmosphere within an inner space thereof for film deposition and an auxiliary device used in the vacuum chamber for assisting film deposition, wherein the auxiliary device is mounted so as to extend in the outside and inside of the vacuum chamber through an opening defined in the vacuum chamber such that the auxiliary device is secured to a stationary structural member disposed outside the vacuum chamber while being attached to the vacuum chamber by a connection member having elasticity and formed from a material capable of maintaining the vacuum atmosphere within the vacuum chamber.