| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a multi-freedom actuator miniaturizable and dispensing with a correcting operation in a precisely locatable driving stage used for a working device, assembling device, inspection device or the like for minute part represented by a semiconductor manufacturing device or the like. SOLUTION: In this multi-freedom driving stage including movement in rotating and inclination directions of at least two axes of X-axis and Y-axis which are linear directions on a two-dimensional plane, a plurality of wires 3 are connected in the part of each edge of a movable stage 2 that is a table capable of placing an intended work to support the movable stage 2. At least three direct operated actuators are arranged on the side part of the movable stage 2 and the bottom part of the movable stage.</p> |
