OPTICAL DEVICE, EXPOSURE DEVICE, DEVICE MANUFACTURING METHOD, DEVICE, AND LENS HOLDING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an exposure device which exposes a body to the processed with a desired resolution by using a lens holding method providing a desired optical performance. SOLUTION: The exposure device has a projection optical system which projects a specific pattern on the body to be processed and the projection optical system has a lens which has three projection parts and projects the pattern and a lens holding member which supports the lens at three points through the projection parts.