| 摘要 |
PROBLEM TO BE SOLVED: To prevent far ultraviolet light from leaking out with top priority when the far ultraviolet ray is used as a light source and to safely handle it. SOLUTION: So that non-image exposure light which does not contribute to image exposure in the far ultraviolet ray emitted by the light source 20, i.e., leak light does not leak out of the image exposing device 10, a far ultraviolet light absorbing member 36 is provided on the inner peripheral surfaces of a casing 30 and a housing 34. Consequently, specially, the far ultraviolet light leaking from an incidence surface of an optical modulator 24 can securely be absorbed and leak light which is generated at other positions can also securely be absorbed.
|
