| 摘要 |
PROBLEM TO BE SOLVED: To provide a regeneration method of multiplayer film reflector capable of suppressing the maintenance cost of an X-ray lighting system low. SOLUTION: This regeneration method of multiplayer film reflector is characterized by removing, in a multiplayer film reflector having a multiplayer film structure of at least two kinds of materials differed in refractive index alternately formed on a base, the multiplayer film formed on the base from the surface by a desired quantity in order to recover the deteriorated optical performance of the multiplayer film reflector.
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