EVAPORATION SOURCE SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an evaporation source system which is capable of preventing a thin film forming material from spilling from a boat. SOLUTION: This evaporation source system has a pair of electrode members 7A and 7B disposed in a vacuum chamber 2, the boat 8 for housing the thin film forming material 9 spanned between the pair of the electrode members 7A and 7B and a power source 30 for heating to supply current I for heating through the pair of the electrode members 7A and 7B to the boat 8. The power source 30 for heating is composed of an inverter 11 which outputs the current I for heating controlled of magnitude by a PWM.