BLT FERROELECTRIC THIN FILM, MANUFACTURING METHOD THEREFORE AND APPLICATION LIQUID THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a concentrated application liquid having a high concentration which does not deteriorate electrical properties of BLT ferroelectric thin films. SOLUTION: The application liquid for forming the BLT ferroelectric thin film is prepared in such a manner that a solution including respective metal alkoxides of Bi, La and Ti as solutes in organic solvents is heated, at the same time, is vaporized under a reduced pressure and is concentrated until the total concentration of the metallic elements becomes 0.1-1.0 mol/L.