| 摘要 |
PROBLEM TO BE SOLVED: To easily identify flaws or the like on the surface of a sample. SOLUTION: An imaging light source 21 of an imaging illumination part 20 is arranged in the outside vicinity of an illumination opening 17 of an integrating sphere 10, composed of a light source having directivity, and illuminates the sample 8 arranged in a sample opening 14 from the direction inclined by a specified angle relative to a normal 14n on the opening surface of the sample opening 14, through the illumination angle 17. An imaging optical system 31 of an imaging part 30 forms an image of a sample 8 arranged in the sample opening 14 on the light receiving surface of an area sensor 32 through an imaging opening 16, and forms the image of a range containing a part of the sample opening 14. The area sensor 32 is formed by two-dimensionally arranging a photoelectric conversion element such as a plurality of CCDs for example, operated based on a control signal from a control part 50, and outputs an electric signal corresponding to the intensity of light received as an imaging signal.
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