POLISHING PAINT AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To produce polishing paint uniformly dispersing abrasive grains having <=1μm an average grain diameter, preferably <=100 nm, as the abrasive grains in a state of primary particles of a polished film. SOLUTION: This polishing paint comprises a slurry containing the abrasive grains dispersed therein and a sol mixed with the slurry and three-dimensionally bound by gelation to form a three-dimensional network structure. In the production of the polished film, the abrasive grains gel during drying of the polishing paint applied to the surface of a base film and are three-dimensionally bound to form the three-dimensional network structure. Thereby, the abrasive grains are fixed with the three-dimensional network structure and a polishing layer fixing the abrasive grains is formed on the surface of the base film.