| 摘要 |
PROBLEM TO BE SOLVED: To suppress the oscillation leak to outside in an oscillator type angular velocity sensor. SOLUTION: A rigid substrate 10 is fixed at the periphery to an apparatus enclosure 40. On the upside of the substrate 10 a detecting piezoelectric element 70a, an insulation member 60a, a driving piezoelectric element 30a and a weight 20a are laminated to form a circular columnar structure Wa. On the downside of the substrate the same circular columnar structure Wb is formed. An a-c driving signal is applied to the piezoelectric elements 30a, 30b to oscillate the structures Wa, Wb in a z-axis direction such that the oscillating direction of the structure Wa is reverse to that of the structure Wb to suppress the oscillation leak to outside through the substrate 10. Four electrodes are formed on the surfaces of the piezoelectric elements 70a, 70b to independently detect voltages based on stresses in the z-axial direction exerted on a positive and negative portions in the x-axis direction and a positive and negative portions in the y-axis direction. Coriolis forces in the x- and y-axis directions exerted on the weights 20a, 20b are obtained to detect the angular velocitiesωy,ωx around the x- and y-axes.
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