OPTICAL MODULATING DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To lower the driving voltage of an optical modulating device which bends a both end-fixed beam with an electrostatic force. SOLUTION: An electrode 203 is provided in a hollow of a substrate 201. The beam 205 is fixed opposite the electrode with L-shaped fixed end parts 210 at both its ends, projecting from the substrate 201. While the beam 205 is not deformed with the electrostatic force, a nonparallel gap 208 is formed between the beam 205 and electrode 203.